IP Library Granted Patent US 6,587,613
Granted Patent Utility
US 6,587,613 · Confirmation No. 6290

HYBRID MEMS FABRICATION METHOD AND NEW OPTICAL MEMS DEVICE

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Code Description Pages PDF
2001-07-24 TRNA Transmittal of New Application 1 View
2001-07-24 SPEC Specification 18 View
2001-07-24 CLM Claims 6 View
2001-07-24 ABST Abstract 1 View
2001-07-24 DRW Drawings-only black and white line drawings 7 View
2001-07-24 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,587,613
App. No.
09/911,818
Filed
2001-07-24
Granted
2003-07-01
Pub. No.
US20030021523A1
Art Unit
2873
PTA
-57 days