Patent Application
Utility
App. No. 09/917,067
· Confirmation No. 6248
MONITORING AND TEST STRUCTURES FOR SILICON ETCHING
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-07-26 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-07-26 | SPEC |
Specification | 15 | View | |
| 2001-07-26 | CLM |
Claims | 3 | View | |
| 2001-07-26 | ABST |
Abstract | 1 | View | |
| 2001-07-26 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-07-26 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Jeffery S. Hess
Corvallis, OR
Steven D. Leith
Albany, OR
Donald W. Schulte
Corvallis, OR
William Edwards
Albany, OR
Jeffrey S. Obert
Corvallis, OR
Timothy R. Emery
Corvallis, OR
Attorneys & Agents of Record
Classification
USPC
438/11
H10P72/0604
H10P74/00
H10P74/238
B41J2/16
B41J2/1626
Prosecution
- Examiner
- ROMAN, ANGEL
- Art Unit
- 2812
- Docket No.
- 10011266-1
- Confirmation No.
- 6248
Publication
- Pub. No.
- US20030022397A1
- Pub. Date
- 2003-01-30
Patent Term Adjustment
-8days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-06-09
from
EMERY, TIMOTHY R.,
HESS, JEFFERY S.,
SCHULTE, DONALD W.,
LEITH, STEVEN D.,
EDWARDS, WILLIAM,
OBERT, JEFFREY S.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-04
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Quick Facts
- App. No.
- 09/917,067
- Filed
- 2001-07-26
- Granted
- 2003-07-29
- Pub. No.
- US20030022397A1
- Examiner
- ROMAN, ANGEL
- Art Unit
- 2812
- PTA
- -8 days
External Links