Granted Patent
Utility
US 6,642,112
· Confirmation No. 3506
NON-OXIDIZING SPACER DENSIFICATION METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-07 | RESC |
Rescind Nonpublication Request for Pre Grant Publication | 7 | View | |
| 2001-07-30 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-07-30 | SPEC |
Specification | 21 | View | |
| 2001-07-30 | CLM |
Claims | 9 | View | |
| 2001-07-30 | ABST |
Abstract | 1 | View | |
| 2001-07-30 | DRW |
Drawings-only black and white line drawings | 8 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/275
Prosecution
- Examiner
- PHAM, LONG
- Art Unit
- 2814
- Customer No.
- 47713
- Docket No.
- ZIL-518
- Confirmation No.
- 3506
Publication
- Pub. No.
- US20030203577A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
-5days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-30
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Quick Facts
- Patent No.
- US 6,642,112
- App. No.
- 09/918,364
- Filed
- 2001-07-30
- Granted
- 2003-11-04
- Pub. No.
- US20030203577A1
- Examiner
- PHAM, LONG
- Art Unit
- 2814
- PTA
- -5 days
External Links