Granted Patent
Utility
US 6,671,294
· Confirmation No. 3238
LASER SPECTRAL ENGINEERING FOR LITHOGRAPHIC PROCESS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-04 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-04 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-12-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-12-07 | DRW |
Drawings-only black and white line drawings | 34 | View | |
| 2001-12-07 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-07-27 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-07-27 | SPEC |
Specification | 31 | View | |
| 2001-07-27 | CLM |
Claims | 2 | View | |
| 2001-07-27 | ABST |
Abstract | 1 | View | |
| 2001-07-27 | DRW |
Drawings-only black and white line drawings | 25 | View | |
| 2001-07-27 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-07-27 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Armen Kroyan
San Diego, CA
Ivan Lalovic
San Diego, CA
Igor V. Fomenkov
San Diego, CA
Palash P. Das
Vista, CA
Richard L. Sandstrom
Encinitas, CA
John M. Algots
San Diego, CA
Khurshid Ahmed
San Diego, CA
Attorneys & Agents of Record
Classification
USPC
372/20
Prosecution
- Examiner
- MONBLEAU, DAVIENNE N
- Art Unit
- 2828
- Customer No.
- 21773
- Docket No.
- 2001-0074-04
- Confirmation No.
- 3238
Publication
- Pub. No.
- US20020048288A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
0days
Parent
is a Continuation in-part of
→
App. 09/608,543
· US 6,721,340
Filed 2000-06-30
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/854,097
· US 6,757,316
Filed 2001-05-11
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/597,812
· US 6,529,531
Filed 2000-06-19
· Patented Case
Parent
is a Continuation in-part of
→
App. 08/898,630
· US 6,078,599
Filed 1997-07-22
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/501,160
· US 6,621,846
Filed 2000-02-09
· Patented Case
Child
is a Continuation in-part of
→
App. 10/915,517
· US 7,382,815
Filed 2004-08-09
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/022190
Filed 2002-07-11
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
is a Continuation of
→
App. 10/701,280
· US 7,139,301
Filed 2003-11-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 10/036,925
· US 6,853,653
Filed 2001-12-21
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2002/012396
Filed 2002-04-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
is a Continuation in-part of
→
App. 10/912,933
· US 7,298,770
Filed 2004-08-05
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
ALGOTS, JOHN M.,
AHMED, KHURSHID,
DAS, PALASH P.,
FOMENKOV, IGOR V.,
KROYAN, ARMEN,
LALOVIC, IVAN,
SANDSTROM, RICHARD L.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-18
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Quick Facts
- Patent No.
- US 6,671,294
- App. No.
- 09/918,773
- Filed
- 2001-07-27
- Granted
- 2003-12-30
- Pub. No.
- US20020048288A1
- Examiner
- MONBLEAU, DAVIENNE N
- Art Unit
- 2828
- PTA
- 0 days
External Links