IP Library Granted Patent US 6,509,816
Granted Patent Utility Small
US 6,509,816 · Confirmation No. 2437

ELECTRO CERAMIC MEMS STRUCTURE WITH OVERSIZED ELECTRODES

⬇ PDF
Code Description Pages PDF
2001-07-30 TRNA Transmittal of New Application 3 View
2001-07-30 ADS Application Data Sheet 3 View
2001-07-30 SPEC Specification 3 View
2001-07-30 CLM Claims 1 View
2001-07-30 ABST Abstract 1 View
2001-07-30 DRW Drawings-only black and white line drawings 1 View
2001-07-30 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,509,816
App. No.
09/918,897
Filed
2001-07-30
Granted
2003-01-21
Pub. No.
US20030020585A1
Art Unit
2832
PTA
-20 days