IP Library Granted Patent US 6,635,158
Granted Patent Utility Small
US 6,635,158 · Confirmation No. 4923

ELECTRO CERAMIC MEMS STRUCTURE WITH CONTROLLED ACTUATOR GAP

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2003-07-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-22 LET. Miscellaneous Incoming Letter 2 View
2001-07-30 TRNA Transmittal of New Application 4 View
2001-07-30 ADS Application Data Sheet 3 View
2001-07-30 SPEC Specification 4 View
2001-07-30 CLM Claims 1 View
2001-07-30 ABST Abstract 1 View
2001-07-30 DRW Drawings-only black and white line drawings 2 View
2001-07-30 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,635,158
App. No.
09/919,569
Filed
2001-07-30
Granted
2003-10-21
Art Unit
1742
PTA
0 days