Method for increasing the spectral and spatial resolution of detectors

1. A method of optical detection of characteristic quantities of an illuminated specimen, comprising:

detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector;

shifting the position of the radiation which is measured in a spatially resolved manner relative to the detector; and

determining intermediate values by an algorithm from the signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein a dispersive element is swiveled for increasing a spectral resolution and, further, an additional movement of the detector and/or a scan unit is carried out.

2. A method of optical detection of characteristic quantities of an illuminated specimen, comprising:

detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector;

shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

determining intermediate values by an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein a dispersive element carries out the shifting of the radiation position and remains station in at least one of its swiveling axes, and a spatially changing effect of the swiveling in this axis is carried out by a scan unit and/or by displacement of the detector,

and a comparison of a measured signal with a reference signal is carried out via comparators in detection channels and in case the reference signal is not reached and/or is exceeded by the measured signal, a change in an operating mode of at least one detection channel is carried out.

3. A method of optical detection of characteristic quantities of an illuminated specimen, comprising:

detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector;

shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

determining intermediate values by an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein signals of detection channels are generated by photon counting and subsequent digital-to-analog conversion.

4. A method of optical detection of characteristic quantities of an illuminated specimen, comprising:

detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector;

shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

determining intermediate values by an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein a dispersive element carries out the shifting of the radiation position and remains stationary in at least one of its swiveling axes, and a spatially changing effect of the swiveling in this axis is carried out by a scan unit and/or by displacement of the detector,

wherein the scan unit comprises an x-y scanner.

5. An arrangement for optical detection of characteristic quantities of an illuminated specimen, comprising:

a detector for detecting a signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, said detector being a spatially revolving detector wherein radiation coming from the specimen is imaged on the detector;

means for imaging the signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, on the detector;

means for shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

means for determining intermediate values using an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein a dispersive element is swiveled for increasing a spectral resolution and, further, an additional movement of the detector and/or a scan unit is carried out.

6. An arrangement for optical detection of characteristic quantities of an illuminated specimen, comprising:

a detector for detecting a signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, said detector being a spatially revolving detector wherein radiation coming from the specimen is imaged on the detector;

means for imaging the signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, on the detector;

means for shifting a position of the radiation which is measured in a spatially resolved manlier relative to the detector; and

means for determining intermediate values using an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein the shifting means includes a dispersive element that carries out the shifting of the radiation position and the dispersive element remains stationary in at least one of its swiveling axes, and a spatially changing effect of the swiveling in this axis is carried out by a scan unit,

and a comparison of a measured signal with a reference signal is carried out via comparators in detection channels and in case the reference signal is not reached and/or is exceeded by the measured signal, a change in an operating mode of at least one detection channel is carried out.

7. An arrangement for optical detection of characteristic quantities of an illuminated specimen, comprising:

a detector for detecting a signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, said detector being a spatially revolving detector wherein radiation coming from the specimen is imaged on the detector;

means for imaging the signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, on the detector;

means for shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

means for determining intermediate values using an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein signals of detection channels are generated by photon counting and subsequent digital-to-analog conversion.

8. An arrangement for optical detection of characteristic quantities of an illuminated specimen, comprising:

a detector for detecting a signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, said detector being a spatially revolving detector wherein radiation coming from the specimen is imaged on the detector;

means for imaging the signal that is backscattered, reflected and/or fluoresced and/or absorbed from the specimen, on the detector;

means for shifting a position of the radiation which is measured in a spatially resolved manner relative to the detector; and

means for determining intermediate values using an algorithm from signals measured in different shifts for purposes of increasing the spatial resolution of the detector;

wherein the shifting means includes a dispersive element that carries out the shifting of the radiation position and the dispersive element remains stationary in at least one of its swiveling axes, and a spatially changing effect of the swiveling in this axis is carried out by a scan unit, and

an X-Y scanner arranged in an illumination path.