IP Library › Granted Patent US 6,563,106
Granted Patent Utility Small
US 6,563,106 · Confirmation No. 9464

MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) MIRROR DEVICE AND METHODS FOR FABRICATING THE SAME

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2020-04-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-04-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-04-13 PA.. Power of Attorney 1 View
2020-04-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2020-04-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-03-25 PA.. Power of Attorney 1 View
2019-03-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-03-25 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2019-03-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2019-03-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2019-03-15 PA.. Power of Attorney 1 View
2019-03-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-03-15 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2014-12-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-12-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-11-21 IMIS Miscellaneous Internal Document 1 View
2001-08-14 TRNA Transmittal of New Application 8 View
2001-08-14 A.PE Preliminary Amendment 27 View
2001-08-14 SPEC Specification 35 View
2001-08-14 CLM Claims 18 View
2001-08-14 ABST Abstract 1 View
2001-08-14 DRW Drawings-only black and white line drawings 10 View
2001-08-14 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,563,106
App. No.
09/929,900
Filed
2001-08-14
Granted
2003-05-13
Examiner
LE, QUE TAN
Art Unit
2878
PTA
-5 days