Patent Application
Utility
App. No. 09/930,290
· Confirmation No. 9506
APPARATUS FOR CLEANING A SUBSTRATE ON WHICH A RESIST PATTERN IS FORMED
Inventor:
Minoru Watanabe
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-24 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-12-24 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-12-24 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-08-16 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-16 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-16 | SPEC |
Specification | 7 | View | |
| 2001-08-16 | CLM |
Claims | 1 | View | |
| 2001-08-16 | ABST |
Abstract | 1 | View | |
| 2001-08-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-08-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Minoru Watanabe
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
396/611
G03F7/40
G03F7/3014
Prosecution
- Examiner
- RUTLEDGE, DELLA J
- Art Unit
- 2851
- Customer No.
- 23995
- Docket No.
- MAE 223 D1
- Confirmation No.
- 9506
Publication
- Pub. No.
- US20010055732A1
- Pub. Date
- 2001-12-27
Patent Term Adjustment
-226days
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Quick Facts
- App. No.
- 09/930,290
- Filed
- 2001-08-16
- Granted
- 2004-02-17
- Pub. No.
- US20010055732A1
- Examiner
- RUTLEDGE, DELLA J
- Art Unit
- 2851
- PTA
- -226 days
External Links