IP Library › Granted Patent US 6,570,603
Granted Patent Utility Small
US 6,570,603 · Confirmation No. 5944

MULTI-BEAM EXPOSURE METHOD

Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-08-20 TRNA Transmittal of New Application 2 View
2001-08-20 SPEC Specification 8 View
2001-08-20 CLM Claims 2 View
2001-08-20 ABST Abstract 1 View
2001-08-20 DRW Drawings-only black and white line drawings 3 View
2001-08-20 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,570,603
App. No.
09/933,506
Filed
2001-08-20
Granted
2003-05-27
Pub. No.
US20020030733A1
Art Unit
2861
PTA
-26 days