IP Library › Granted Patent US 6,544,863
Granted Patent Utility Small
US 6,544,863 · Confirmation No. 8582

A METHOD OF FABRICATING SEMICONDUCTOR WAFERS HAVING MULTIPLE HEIGHT SUBSURFACE LAYERS

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2020-04-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-04-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-04-14 PA.. Power of Attorney 1 View
2020-04-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2020-04-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-04-09 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2019-04-09 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2019-04-04 PA.. Power of Attorney 1 View
2019-04-04 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2019-04-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-03-07 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-03-07 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-02-26 PA.. Power of Attorney 1 View
2014-02-26 MFEE.C.AD Maintenance Fee Address Change 2 View
2014-02-26 SES.REQ Assertion of entitlement to small entity status 1 View
2014-02-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-02-26 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2001-08-21 TRNA Transmittal of New Application 6 View
2001-08-21 SPEC Specification 11 View
2001-08-21 CLM Claims 7 View
2001-08-21 ABST Abstract 1 View
2001-08-21 DRW Drawings-only black and white line drawings 4 View
2001-08-21 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,544,863
App. No.
09/934,783
Filed
2001-08-21
Granted
2003-04-08
Art Unit
2829
PTA
-60 days