IP Library Patent Application 09934788
Patent Application Utility
App. No. 09/934,788 · Confirmation No. 9273

TEST STRUCTURES FOR SUBSTRATE ETCHING

Inventor: Dennis W. Tom
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2001-08-21 TRNA Transmittal of New Application 2 View
2001-08-21 A.PE Preliminary Amendment 5 View
2001-08-21 SPEC Specification 7 View
2001-08-21 CLM Claims 2 View
2001-08-21 ABST Abstract 1 View
2001-08-21 DRW Drawings-only black and white line drawings 5 View
2001-08-21 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/934,788
Filed
2001-08-21
Granted
2002-05-28
Art Unit
2813
PTA
-120 days