Patent Application
Utility
App. No. 09/935,445
· Confirmation No. 9589
Reduced and atmospheric pressure process capable epitaxial chamber
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-23 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-23 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-23 | SPEC |
Specification | 10 | View | |
| 2001-08-23 | CLM |
Claims | 4 | View | |
| 2001-08-23 | ABST |
Abstract | 1 | View | |
| 2001-08-23 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-08-23 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Rudolf Bayer
Moosburg, GERMANY
Manfred Schiekofer
Freising, GERMANY
Guenther Schmidt
Kranzberg, GERMANY
Attorneys & Agents of Record
Classification
USPC
156/345
C30B25/14
C23C16/44
C30B25/08
Prosecution
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1763
- Customer No.
- 23494
- Docket No.
- TI-28686
- Confirmation No.
- 9589
Publication
- Pub. No.
- US20020038689A1
- Pub. Date
- 2002-04-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-23
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Quick Facts
- App. No.
- 09/935,445
- Filed
- 2001-08-23
- Pub. No.
- US20020038689A1
- Examiner
- ALEJANDRO MULERO, LUZ L
- Art Unit
- 1763
External Links