Granted Patent
Utility
US 6,440,802
· Confirmation No. 2964
PROCESS FOR FABRICATING SEMICONDUCTOR DEVICE AND PHOTOLITHOGRAPHY MASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-06-20 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-08-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-08-28 | SPEC |
Specification | 22 | View | |
| 2001-08-28 | CLM |
Claims | 3 | View | |
| 2001-08-28 | ABST |
Abstract | 1 | View | |
| 2001-08-28 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Keiji Hayashi
Fukuyama-shi, JAPAN
Masayuki Nagata
Fukuyama-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/275
H10P30/204
H10D84/0151
H10D84/013
H10D84/0128
H10D84/038
H10P30/212
H10P30/28
Prosecution
- Examiner
- LUU, CHUONG A
- Art Unit
- 2825
- Customer No.
- 23117
- Docket No.
- 900-399
- Confirmation No.
- 2964
Foreign Priority
2000-257539
·
2000-08-28
·
JAPAN
Publication
- Pub. No.
- US20020025632A1
- Pub. Date
- 2002-02-28
Patent Term Adjustment
-56days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-09-11
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-09
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Quick Facts
- Patent No.
- US 6,440,802
- App. No.
- 09/940,060
- Filed
- 2001-08-28
- Granted
- 2002-08-27
- Pub. No.
- US20020025632A1
- Examiner
- LUU, CHUONG A
- Art Unit
- 2825
- PTA
- -56 days
External Links