IP Library Granted Patent US 6,486,077
Granted Patent Utility
US 6,486,077 · Confirmation No. 8927

SILICON NITRIDE FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

Inventor: Hidekazu Sato
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Code Description Pages PDF
2001-12-27 TRNA Transmittal of New Application 3 View
2001-12-27 DRW Drawings-only black and white line drawings 7 View
2001-12-27 OATH Oath or Declaration filed 5 View
2001-08-31 TRNA Transmittal of New Application 3 View
2001-08-31 SPEC Specification 18 View
2001-08-31 CLM Claims 2 View
2001-08-31 ABST Abstract 1 View
2001-08-31 DRW Drawings-only black and white line drawings 11 View
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Quick Facts
Patent No.
US 6,486,077
App. No.
09/942,949
Filed
2001-08-31
Granted
2002-11-26
Pub. No.
US20020041031A1
Art Unit
2813
PTA
0 days