Method for BEOL resistor tolerance improvement using anodic oxidation

1. A method for improving the tolerance of a back-end-of-the-line (BEOL) thin film resistor comprising:

(a) forming a base resistor film on at least one interconnect level of an integrated circuit, said base resistor film having a first sheet resistivity value;

(b) subjecting said base resistor film to anodic oxidation so as to convert a portion of said base resistor film into an anodized region thereby increasing the first sheet resistivity value to a second sheet resistivity value; and

(c) removing portions of said base resistor film and anodized region so as to form at least one trimmed resistor having said second sheet resistivity value on said at least one interconnect level.

2. The method of claim 1 wherein said at least one interconnect level is a patterned interconnect level that is comprised of at least one dielectric, conductively filled vias and at least one resistor opening.

3. The method of claim 1 wherein said at least one interconnect level is an unpatterned interconnect level that is comprised of at least one dielectric, and conductively filled vias.

4. The method of claim 1 wherein said first sheet resistivity value is dependent on the thickness of said base resistor film.

5. The method of claim 1 wherein following the forming of the base resistor film and prior to anodic oxidation an in-situ measurement of said first sheet resistivity value is determined.

6. The method of claim 1 wherein said anodic oxidation comprises applying a voltage to an electrolytic bath, wherein said voltage is based on the following equation:

V

A

⁢

⁢

N

⁢

⁢

O

⁢

⁢

D

=

(

Δ

⁢

⁢

R

R

i

×

C

A

)

⁢

t

wherein

V ANOD =Anodization voltage (volts);

ΔR=Resistance change (ohms);

R i =Initial resistance (ohms);

C A =Anodization factor (Angstroms/volts);

t=Initial film thickness (Angstroms).

7. The method of claim 6 wherein said anodic oxidation is carried out at a voltage of from about less than 1 to about 100 volts for a time period of from about 1 to about 30 minutes.

8. The method of claim 1 wherein said base resistor film has a thickness that is from about 10 to about 20% thicker than that present in said at least one trimmed resistor.

9. The method of claim 1 wherein said base resistor film is TaN.

10. The method of claim 1 wherein said at least one trimmed resistor provided in step (c) is coplanar with a top surface of said at least one interconnect level.

11. The method of claim 10 wherein step (c) comprises a planarization process selected from the group consisting of chemical mechanical polishing and grinding.

12. The method of claim 1 wherein said at least one trimmed resistor provided in step (c) is non-coplanar with at top surface of said at least one interconnect level.

13. The method of claim 12 wherein step (c) comprises lithography and etching.

14. The method of claim 12 wherein step (c) comprises etching of only the anodized region.

15. The method of claim 1 wherein said at least one trimmed resistor is a patterned resistor.

16. A method for improving the tolerance of a back-end-of-the-line (BEOL) thin film resistor comprising:

(a) forming a base resistor film on at least one interconnect level of an integrated circuit;

(b) measuring the base resistor film's thickness and converting the same to a first sheet resistivity value;

(c) subjecting said base resistor film to anodic oxidation so as to convert a portion of said base resistor film into an anodized region thereby increasing the first sheet resistivity value to a second sheet resistivity value; said anodic oxidization comprising using an applied voltage that is based on the following equation:

V

A

⁢

⁢

N

⁢

⁢

O

⁢

⁢

D

=

(

Δ

⁢

⁢

R

R

i

×

C

A

)

⁢

t

wherein

V ANOD =Anodization voltage (volts);

ΔR=Resistance change (ohms);

R i =Initial resistance (ohms);

C A =Anodization factor (Angstroms/volts);

t=Initial film thickness (Angstroms); and

(d) removing portions of said base resistor film and anodized region so as to form at least one trimmed resistor having said second sheet resistivity value on said at least one interconnect level.

17. The method of claim 16 wherein steps (b)-(d) are repeated any number of times.

18. A method for improving the tolerance of a back-end-of-the-line (BEOL) thin film resistor comprising:

forming a base resistor film on at least one interconnect level of an integrated circuit, said base resistor film having a first sheet resistivity value;

subjecting said base resistor film to anodic oxidation so as to convert a portion of said base resistor film into an anodized region thereby increasing the first sheet resistivity value to a second sheet resistivity value; and

removing portions of said base resistor film and anodized region so as to form at least one trimmed resistor having said second sheet resistivity value on said at least one interconnect level, wherein said anodic oxidation comprises applying a voltage to an electrolytic bath, said voltage being based on the following equation:

V

A

⁢

⁢

N

⁢

⁢

O

⁢

⁢

D

=

(

Δ

⁢

⁢

R

R

i

×

C

A

)

⁢

t

wherein

V ANOD =Anodization voltage (volts);

ΔR=Resistance change (ohms);

R i =Initial resistance (ohms);

C A =Anodization factor (Angstroms/volts);

t=Initial film thickness (Angstroms).