IP Library Granted Patent US 6,649,987
Granted Patent Utility Small
US 6,649,987 · Confirmation No. 3641

MEMS HYBRID STRUCTURE HAVING FLIPPED SILICON WITH EXTERNAL STANDOFFS

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Code Description Pages PDF
2003-08-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-13 LET. Miscellaneous Incoming Letter 1 View
2001-10-09 TRNA Transmittal of New Application 4 View
2001-10-09 ADS Application Data Sheet 4 View
2001-10-09 SPEC Specification 6 View
2001-10-09 CLM Claims 1 View
2001-10-09 ABST Abstract 1 View
2001-10-09 DRW Drawings-only black and white line drawings 3 View
2001-10-09 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,649,987
App. No.
09/975,119
Filed
2001-10-09
Granted
2003-11-18
Art Unit
2814
PTA
-12 days