Granted Patent
Utility
US 6,538,388
· Confirmation No. 3666
PLASMA PROCESSING APPARATUS SUITABLE FOR POWER SUPPLY OF HIGHER FREQUENCY
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-19 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2001-10-15 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-15 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-10-15 | SPEC |
Specification | 114 | View | |
| 2001-10-15 | CLM |
Claims | 17 | View | |
| 2001-10-15 | ABST |
Abstract | 1 | View | |
| 2001-10-15 | DRW |
Drawings-only black and white line drawings | 28 | View | |
| 2001-10-15 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Akira Nakano
Miyagi-ken, JAPAN
Tadahiro Ohmi
Miyagi-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
315/111.21
B65G47/912
H01J37/32082
H01J37/32183
H05H1/46
Prosecution
- Examiner
- DINH, TRINH VO
- Art Unit
- 2821
- Docket No.
- 9281-4201
- Confirmation No.
- 3666
Foreign Priority
2000-315728
·
2000-10-16
·
JAPAN
Publication
- Pub. No.
- US20020088776A1
- Pub. Date
- 2002-07-11
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-15
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Quick Facts
- Patent No.
- US 6,538,388
- App. No.
- 09/977,453
- Filed
- 2001-10-15
- Granted
- 2003-03-25
- Pub. No.
- US20020088776A1
- Examiner
- DINH, TRINH VO
- Art Unit
- 2821
- PTA
- 0 days
External Links