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App. No. 09/981,824 · Confirmation No. 8176

CHEMICAL VAPOR DEPOSITION APPARATUS AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

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Quick Facts
App. No.
09/981,824
Filed
2001-10-19
Granted
2003-10-28
Pub. No.
US20020023588A1
Art Unit
1763
PTA
0 days