IP Library › Granted Patent US 6,550,988
Granted Patent Utility
US 6,550,988 · Confirmation No. 2638

SUBSTRATE PROCESSING APPARATUS

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-10-30 TRNA Transmittal of New Application 2 View
2001-10-30 SPEC Specification 48 View
2001-10-30 CLM Claims 8 View
2001-10-30 ABST Abstract 1 View
2001-10-30 DRW Drawings-only black and white line drawings 14 View
2001-10-30 OATH Oath or Declaration filed 4 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,550,988
App. No.
09/984,533
Filed
2001-10-30
Granted
2003-04-22
Pub. No.
US20020051644A1
Art Unit
2851
PTA
0 days