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US 6,773,853 · Confirmation No. 2966

SEMICONDUCTOR DEVICE MANUFACTURE METHOD WITH EXPOSURE PROCESS USING SMALL EXPOSURE AMOUNT, AND RETICLE SET FOR SEMICONDUCTOR DEVICE MANUFACTURE

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2004-06-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-29 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-29 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-04-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-19 SRNT Examiner's search strategy and results 2 View
2004-02-24 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2004-02-24 DRW Drawings-only black and white line drawings 1 View
2004-02-24 CLM Claims 14 View
2004-02-24 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-02-24 DRW Drawings-only black and white line drawings 8 View
2004-02-24 XT/ Extension of Time 1 View
2004-02-24 RCEX Request for Continued Examination (RCE) 2 View
2003-11-04 CTFR Final Rejection 13 View
2003-08-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-20 CLM Claims 13 View
2003-08-20 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-06-03 CTNF Non-Final Rejection 10 View
2003-06-03 892 List of references cited by examiner 1 View
2003-05-20 SRNT Examiner's search strategy and results 2 View
2001-11-01 TRNA Transmittal of New Application 3 View
2001-11-01 SPEC Specification 20 View
2001-11-01 CLM Claims 13 View
2001-11-01 ABST Abstract 1 View
2001-11-01 DRW Drawings-only black and white line drawings 8 View
2001-11-01 OATH Oath or Declaration filed 5 View
2001-11-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-01 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-01 FWCLM Index of Claims 1 View
2001-11-01 TRNA Transmittal of New Application 3 View
2001-11-01 DRW Drawings-only black and white line drawings 8 View
2001-11-01 SPEC Specification 20 View
2001-11-01 CLM Claims 13 View
2001-11-01 ABST Abstract 1 View
2001-11-01 OATH Oath or Declaration filed 5 View
2001-11-01 WFEE Fee Worksheet (SB06) 1 View
2001-11-01 WFEE Fee Worksheet (SB06) 1 View
2001-11-01 WCLM Claims Worksheet (PTO-2022) 1 View
2001-11-01 FRPR Certified Copy of Foreign Priority Application 43 View
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Quick Facts
Patent No.
US 6,773,853
App. No.
09/985,004
Filed
2001-11-01
Granted
2004-08-10
Pub. No.
US20020182545A1
Examiner
SAGAR, KRIPA
Art Unit
1756
PTA
0 days