Granted Patent
Utility
US 6,549,264
· Confirmation No. 4495
EXTREME-UV LITHOGRAPHY VACUUM CHAMBER ZONE SEAL
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-06 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-11-06 | A.PE |
Preliminary Amendment | 11 | View | |
| 2001-11-06 | SPEC |
Specification | 20 | View | |
| 2001-11-06 | CLM |
Claims | 7 | View | |
| 2001-11-06 | ABST |
Abstract | 1 | View | |
| 2001-11-06 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-11-06 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Steven J. Haney
Tracy, CA
Donald Joe Herron
Manteca, CA
Leonard E. Klebanoff
San Ramon, CA
William C. Replogle
Livermore, CA
Attorneys & Agents of Record
Classification
USPC
355/30
G03F7/70808
G03F7/70833
G03F7/70841
Prosecution
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- Customer No.
- 37044
- Docket No.
- 023890-089 (SD-8179.3)
- Confirmation No.
- 4495
Publication
- Pub. No.
- US20020048002A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
0days
from
SANDIA CORPORATION
CHANGE OF NAME
Recorded 2017-11-03
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Quick Facts
- Patent No.
- US 6,549,264
- App. No.
- 09/985,875
- Filed
- 2001-11-06
- Granted
- 2003-04-15
- Pub. No.
- US20020048002A1
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- PTA
- 0 days
External Links