IP Library › Patent Application 09987247
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App. No. 09/987,247 · Confirmation No. 6832

METHOD FOR MANFACTURING A SEMICONDUCTOR DEVICE USING THERMAL CVD WITH NH3 AND SIHXF4-X

Inventor: Takayuki Abe
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-06-30 ABN Abandonment 2 View
2001-11-14 TRNA Transmittal of New Application 1 View
2001-11-14 SPEC Specification 29 View
2001-11-14 CLM Claims 4 View
2001-11-14 ABST Abstract 1 View
2001-11-14 DRW Drawings-only black and white line drawings 9 View
2001-11-14 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/987,247
Filed
2001-11-14
Pub. No.
US20020061659A1
Art Unit
2822