Granted Patent
Utility
US 6,705,331
· Confirmation No. 6960
SUBSTRATE CLEANING APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-02-04 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-11-14 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-14 | SPEC |
Specification | 18 | View | |
| 2001-11-14 | CLM |
Claims | 4 | View | |
| 2001-11-14 | ABST |
Abstract | 1 | View | |
| 2001-11-14 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-11-14 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Masanobu Sato
Kyoto, JAPAN
Sadao Hirae
Kyoto, JAPAN
Shuichi Yasuda
Kyoto, JAPAN
Kenya Morinishi
Kyoto, JAPAN
Classification
USPC
134/99.1
H10P72/0412
B08B1/36
B08B3/02
B08B2203/0288
Y10S134/902
Prosecution
- Examiner
- STINSON, FRANKIE L
- Art Unit
- 1746
- Docket No.
- 50099-190
- Confirmation No.
- 6960
Foreign Priority
P2000-352076
·
2000-11-20
·
JAPAN
Publication
- Pub. No.
- US20020059947A1
- Pub. Date
- 2002-05-23
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-11-14
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Quick Facts
- Patent No.
- US 6,705,331
- App. No.
- 09/987,270
- Filed
- 2001-11-14
- Granted
- 2004-03-16
- Pub. No.
- US20020059947A1
- Examiner
- STINSON, FRANKIE L
- Art Unit
- 1746
- PTA
- 0 days
External Links