RETICLE ALIGNMENT SYSTEM FOR USE IN LITHOGRAPHY

Inventors: Craig R. Simpson, Mark S. Lucas

Patented Case View Patent ↗ View Publication ↗

	Code	Description	Pages	PDF
2001-11-20	`TRNA`	Transmittal of New Application	1	View
2001-11-20	`SPEC`	Specification	4	View
2001-11-20	`CLM`	Claims	3	View
2001-11-20	`ABST`	Abstract	1	View
2001-11-20	`DRW`	Drawings-only black and white line drawings	2	View

Inventors

Craig R. Simpson Danville, VT

Mark S. Lucas Groton, MA

Attorneys & Agents of Record

MARK SOLOMON Reg. 44348 Attorney · HAMILTON, BROOK, SMITH & REYNOLDS, P.C.

Classification

USPC 355/53

G03F7/7085 G03F7/70666 G03F9/7088

Prosecution

Publication

Patent Term Adjustment

-27days

RUDOLPH TECHNOLOGIES, INC.

from AZORES CORPORATION

NUNC PRO TUNC ASSIGNMENT Recorded 2013-04-12

COAST BUSINESS CREDIT

from MRS TECHNOLOGY, INC.

STATE OF MASS. FORM UCC-1; MOTION OF ENTRY OF ORDER TO TERMINATE AUTOMATIC STAY; AND PROCEEDING MEMORANDUM/ORDER OF COURT. Recorded 2002-10-02

AZORES CORPORATION

from COAST BUSINESS CREDIT

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2002-10-02

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