Granted Patent
Utility
US 6,533,867
· Confirmation No. 3369
SURFACE SEALING SHOWERHEAD FOR VAPOR DEPOSITION REACTOR HAVING INTEGRATED FLOW DIVERTERS
Inventor:
Robert Doppelhammer
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-02-04 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2001-11-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-11-20 | SPEC |
Specification | 9 | View | |
| 2001-11-20 | CLM |
Claims | 4 | View | |
| 2001-11-20 | ABST |
Abstract | 1 | View | |
| 2001-11-20 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-11-20 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Robert Doppelhammer
Mound, MN
Attorneys & Agents of Record
Classification
USPC
118/715
C23C16/45574
C23C16/45565
Prosecution
- Examiner
- LUND, JEFFRIE ROBERT
- Art Unit
- 1763
- Customer No.
- 23552
- Docket No.
- 10920.26USU1
- Confirmation No.
- 3369
Publication
- Pub. No.
- US20020059904A1
- Pub. Date
- 2002-05-23
Patent Term Adjustment
-61days
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Quick Facts
- Patent No.
- US 6,533,867
- App. No.
- 09/990,971
- Filed
- 2001-11-20
- Granted
- 2003-03-18
- Pub. No.
- US20020059904A1
- Examiner
- LUND, JEFFRIE ROBERT
- Art Unit
- 1763
- PTA
- -61 days
External Links