Patent Application
Utility
Small
App. No. 10/001,358
· Confirmation No. 2292
PROCESS FOR PRODUCING MACROSCOPIC CAVITIES BENEATH THE SURFACE OF A SILICON WAFER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-05-06 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-02-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-02-19 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-10-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-10-09 | CLM |
Claims | 8 | View | |
| 2003-10-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-10-09 | XT/ |
Extension of Time | 1 | View | |
| 2003-04-09 | CTNF |
Non-Final Rejection | 3 | View | |
| 2003-04-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2002-02-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-02-07 | FOR |
Foreign Reference | 10 | View | |
| 2001-10-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-24 | SPEC |
Specification | 14 | View | |
| 2001-10-24 | CLM |
Claims | 7 | View | |
| 2001-10-24 | ABST |
Abstract | 1 | View | |
| 2001-10-24 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-10-24 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-10-24 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2001-10-24 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-10-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-10-24 | FWCLM |
Index of Claims | 1 | View | |
| 2001-10-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-24 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-10-24 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View | |
| 2001-10-24 | SPEC |
Specification | 14 | View | |
| 2001-10-24 | CLM |
Claims | 7 | View | |
| 2001-10-24 | ABST |
Abstract | 1 | View | |
| 2001-10-24 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-10-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-10-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-10-24 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Charles P. Beetz JR.
Southbury, CT
Robert W. Boerstler
Woodbury, CT
Attorneys & Agents of Record
Classification
USPC
438/745
H10P50/613
H10P50/691
Prosecution
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- Customer No.
- 530
- Docket No.
- NANO 3.0-007
- Confirmation No.
- 2292
Publication
- Pub. No.
- US20020086551A1
- Pub. Date
- 2002-07-04
Patent Term Adjustment
-92days
BURLE TECHNOLOGIES, LLC,
PHOTONIS DEFENSE, INC.,
PHOTONIS SCIENTIFIC, INC.,
PHOTONIS FRANCE SAS,
PHOTONIS NETHERLANDS, B.V.
RELEASE OF INTELLECTUAL PROPERTY SECURITY INTERESTS AT R/F 048357/0067
Recorded 2022-01-27
SECURITY INTEREST
Recorded 2019-02-16
SECURITY AGREEMENT
Recorded 2013-09-20
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-24
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Quick Facts
- App. No.
- 10/001,358
- Filed
- 2001-10-24
- Granted
- 2004-06-15
- Pub. No.
- US20020086551A1
- Examiner
- DEO, DUY VU NGUYEN
- Art Unit
- 1765
- PTA
- -92 days
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