IP Library Granted Patent US 6,861,130
Granted Patent B2
US 6,861,130 · App. 10/001,575 · Granted Mar 1, 2005

Sintered polycrystalline gallium nitride and its production

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Quick Facts
Patent No.
US 6,861,130
App. No.
10/001,575
Granted
Mar 1, 2005
Kind
B2
Abstract

Polycrystalline gallium nitride (GaN) characterized by having the atomic fraction of gallium ranging from between about 49% to 55%, an apparent density of between about 5.5 and 6.1 g/cm 3 , and a Vickers hardness of above about 1 GPa. Polycrystalline GaN can be made by hot isostatic pressing (HIPing) at a temperature ranging from about 1150° C. to 1300° C. and a pressure ranging from between about 1 and 10 Kbar. Alternatively, polycrystalline GaN can be made by high pressure/high temperature (HP/HT) sintering at a temperature ranging from about 1200° to 1800° C. and a pressure ranging from about 5 to 80 Kbar.

Claims (33)

1. Polycrystalline gallium nitride (CaN), having an apparent density of between about 5.5 and 6.1 g/cm 3 , a Vickers hardness of above about 1 GPa, eguiaxed grains with an average size of between about 0.01 and 50 μm, and wherein the atomic fraction of gallium ranges from between about 49% to 55%.

2. The GaN of claim 1 , which has a thickness or minimum dimension of between about 0.2 mm and 1 m.

3. The GaN of claim 1 , which has a diameter or maximum dimension of between about 1 mm and 1 m.

4. The CaN of claim 1 , having surfaces that are substantially smooth, with a root-mean-square roughness below about 100 μm.

5. The GaN of claim 4 , having surfaces that are substantially smooth, with a root-mean-square roughness below about 20 μm.

6. A method for making sintered polycrystalline gallium nitride (GaN), which comprises the steps of:

(a) enclosing and sealing GaN as one or more of powder or a cold-pressed pill, in a non-metallic container;

(b) subjecting said container to hot isostatic pressing (HIPing) at a temperature ranging from about 1150° C. to 1300° C. and a pressure ranging from between about 1 and 10 Kbar; and

(c) recovering polycrystalline GaN from said container.

7. The method of claim 6 , wherein said non-metallic container is evacuated of air prior to sealing.

8. The method of claim 6 , wherein said HIPing is conducted for a time ranging from about 2 minutes to about 24 hours.

9. The method of claim 6 , wherein said recovering step includes grinding off the container from said sintered polycrystalline GaN.

10. The method of claim 6 , wherein said sintered polycrystalline GaN has a thickness or minimum dimension of between about 0.2 mm and 1 m.

11. The method of claim 6 , wherein said sintered polycrystalline GaN has a diameter or maximum dimension of between about 1 mm and 1 m.

12. The method of claim 6 , wherein said sintered polycrystalline GaN has equiaxed grains with an average size of between about 0.01 and 50 μm.

13. The method of claim 6 , wherein said sintered polycrystalline GaN has surfaces, which are substantially smooth, with a root-mean-square roughness below about 100 μm.

14. The method of claim 13 , wherein said sintered polycrystalline GaN has surfaces, which are substantially smooth, with a root-mean-square roughness below about 20 μm.

15. The method of claim 6 , wherein said GaN enclosed in said container is a powder.

16. The method of claim 6 , wherein said GaN enclosed in said container is a cold-pressed pill.

17. A method for making sintered polycrystalline gallium nitride (GaN), which comprises the steps of:

(a) placing GaN as one or more of powder or a cold-pressed pill in a high pressure/high temperature (HP/HT) reaction cell;

(b) placing said reaction cell in a HP/HT apparatus;

(c) subjecting said container to a temperature ranging from about 1200° to 1800° C. and a pressure ranging from about 5 to 80 Kbar; and

(d) recovering polycrystalline GaN from said reaction cell.

18. The method of claim 17 , wherein step (c) is conducted for a time ranging from about 2 minutes to about 24 hours.

19. The method of claim 17 , wherein said recovering step includes grinding.

20. The method of claim 17 , wherein said sintered polycrystalline GaN has a thickness or minimum dimension of between about 0.2 mm and 1 m.

21. The method of claim 17 , wherein said sintered polycrystalline GaN has a diameter or maximum dimension of between about 1 mm and 1 m.

22. The method of claim 17 , wherein said sintered polycrystalline GaN has equiaxed grains with an average size of between about 0.01 and 50 μm.

23. The method of claim 17 , wherein said sintered polycrystalline GaN has surfaces, which are substantially smooth, with a root-mean-square roughness below about 100 μm.

24. The method of claim 23 , wherein said sintered polycrystalline GaN has surfaces that are substantially smooth, with a root-mean-square roughness below about 20 μm.

25. The method of claim 17 , wherein said GaN enclosed in said container is a powder.

26. The method of claim 17 , wherein said GaN enclosed in said container is a cold-pressed pill.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Dec 24, 2020
From: THE BANK OF NEW YORK MELLON TRUST COMPANY, N.A., AS COLLATERAL AGENT
To: MOMENTIVE PERFORMANCE MATERIALS INC.
Reel/Frame 054883/0855 →
RELEASE OF SECURITY INTEREST Recorded Nov 11, 2020
From: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
To: MOMENTIVE PERFORMANCE MATERIALS INC.; MOMENTIVE PERFORMANCE MATERIALS GMBH & CO KG; MOMENTIVE PERFORMANCE MATERIALS JAPAN HOLDINGS GK
Reel/Frame 054387/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Recorded May 21, 2019
From: JPMORGAN CHASE BANK, N.A.
To: MOMENTIVE PERFORMANCE MATERIALS INC.
Reel/Frame 050304/0555 →