Patent Application
Utility
PCT National Stage
App. No. 10/009,735
· Confirmation No. 6035
Low-permittivity porous siliceous film, semiconductor devices having such films, and coating composition for forming the film
Abandoned -- Failure to Respond to an Office Action
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Inventors
Tomoko Aoki
Shizuoka, JAPAN
Yasuo Shimizu
Saitama, JAPAN
Attorneys & Agents of Record
Classification
USPC
428/446
C01B33/12
C09D183/16
H10P14/6922
H10P14/6529
H10P14/665
H10P14/6689
H10P14/6342
H10P14/69215
C08L2666/04
Prosecution
- Examiner
- STEIN, STEPHEN J
- Art Unit
- 1775
- Customer No.
- 22428
- Docket No.
- 053466-0317
- Confirmation No.
- 6035
Foreign Priority
11-199282
·
1999-07-13
·
JAPAN
Publication
- Pub. No.
- US20030099843A1
- Pub. Date
- 2003-05-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-20
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-17
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Quick Facts
- App. No.
- 10/009,735
- Filed
- 2001-12-17
- Pub. No.
- US20030099843A1
- Examiner
- STEIN, STEPHEN J
- Art Unit
- 1775
External Links