IP Library › Granted Patent US 6,660,651
Granted Patent Utility
US 6,660,651 · Confirmation No. 7840

ADJUSTABLE WAFER STAGE, AND A METHOD AND SYSTEM FOR PERFORMING PROCESS OPERATIONS USING SAME

Inventor: Richard J. Markle
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2001-11-08 SPEC Specification 22 View
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Quick Facts
Patent No.
US 6,660,651
App. No.
10/010,463
Filed
2001-11-08
Granted
2003-12-09
Art Unit
1765
PTA
0 days