Patent Application
Utility
App. No. 10/014,136
· Confirmation No. 1517
FABRICATION METHOD FOR CORRECTING MEMBER, FABRICATION METHOD FOR PROJECTION OPTICAL SYSTEM, AND EXPOSURE APPARATUS
Inventor:
Tomoyuki Matsuyama
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
View Patent ↗
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-12-13 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-12-13 | ADS |
Application Data Sheet | 1 | View | |
| 2001-12-13 | SPEC |
Specification | 29 | View | |
| 2001-12-13 | CLM |
Claims | 7 | View | |
| 2001-12-13 | ABST |
Abstract | 1 | View | |
| 2001-12-13 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2001-12-13 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Tomoyuki Matsuyama
Kitakatsushika-gun, JAPAN
Attorneys & Agents of Record
Classification
USPC
355/52
G03B27/68
G03F7/20
G03F7/70308
G03F7/706
Prosecution
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- Customer No.
- 25944
- Docket No.
- 108219
- Confirmation No.
- 1517
Foreign Priority
2000-379674
·
2000-12-14
·
JAPAN
Publication
- Pub. No.
- US20020105627A1
- Pub. Date
- 2002-08-08
Patent Term Adjustment
0days
No related applications found.
SECURITY AGREEMENT
Recorded 2007-01-09
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 10/014,136
- Filed
- 2001-12-13
- Granted
- 2003-10-28
- Pub. No.
- US20020105627A1
- Examiner
- FULLER, RODNEY EVAN
- Art Unit
- 2851
- PTA
- 0 days
External Links