IP Library Patent Application 10014136
Patent Application Utility
App. No. 10/014,136 · Confirmation No. 1517

FABRICATION METHOD FOR CORRECTING MEMBER, FABRICATION METHOD FOR PROJECTION OPTICAL SYSTEM, AND EXPOSURE APPARATUS

Inventor: Tomoyuki Matsuyama
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-09-03 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-12-13 TRNA Transmittal of New Application 1 View
2001-12-13 ADS Application Data Sheet 1 View
2001-12-13 SPEC Specification 29 View
2001-12-13 CLM Claims 7 View
2001-12-13 ABST Abstract 1 View
2001-12-13 DRW Drawings-only black and white line drawings 13 View
2001-12-13 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/014,136
Filed
2001-12-13
Granted
2003-10-28
Pub. No.
US20020105627A1
Art Unit
2851
PTA
0 days