IP Library › Granted Patent US 6,607,968
Granted Patent Utility PCT National Stage
US 6,607,968 · Confirmation No. 1715

METHOD FOR MAKING A SILICON SUBSTRATE COMPRISING A BURIED THIN SILICON OXIDE FILM

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 Code Description Pages PDF
2002-04-22 TRNA Transmittal of New Application 4 View
2002-04-22 A.PE Preliminary Amendment 1 View
2002-04-22 CLM Claims 5 View
2002-04-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-04-22 SPEC Specification 9 View
2002-04-22 ABST Abstract 1 View
2002-04-22 REM Applicant Arguments/Remarks Made in an Amendment 13 View
2002-04-22 SPEC Specification 10 View
2002-04-22 CLM Claims 3 View
2002-04-22 ABST Abstract 1 View
2002-04-22 DRW Drawings-only black and white line drawings 2 View
2002-04-22 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,607,968
App. No.
10/018,680
Filed
2002-04-22
Effective Filing
2001-12-14
Granted
2003-08-19
Art Unit
2825
PTA
-60 days