IP Library Granted Patent US 6,776,538
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Granted Patent Utility Small
US 6,776,538 · Confirmation No. 2239

MEMS TUNABLE OPTICAL FILTER SYSTEM WITH MOISTURE GETTER FOR FREQUENCY STABILITY

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Quick Facts
Patent No.
US 6,776,538
App. No.
10/021,765
Filed
2001-12-12
Granted
2004-08-17
Pub. No.
US20030108306A1
Art Unit
2874
PTA
-36 days