Patent Application
Utility
App. No. 10/024,580
· Confirmation No. 4156
METHOD AND APPARATUS FOR DRY ETCHING
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-12-21 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-12-21 | SPEC |
Specification | 50 | View | |
| 2001-12-21 | CLM |
Claims | 4 | View | |
| 2001-12-21 | ABST |
Abstract | 1 | View | |
| 2001-12-21 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2001-12-21 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/714
H01J37/32449
H10P70/273
H10P50/268
H10P50/244
H10P50/267
H10P50/242
H10P50/283
H01J37/32082
H01J37/32192
H01J37/3244
H01J37/32834
H01J37/32935
H01J2237/3322
H01J2237/334
H01J2237/3343
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Customer No.
- 24956
- Docket No.
- H-378-10
- Confirmation No.
- 4156
Foreign Priority
3-071464
·
1991-04-04
·
JAPAN
4-003675
·
1992-01-13
·
JAPAN
4-068098
·
1992-03-26
·
JAPAN
4-061736
·
1992-03-18
·
JAPAN
Publication
- Pub. No.
- US20020098708A1
- Pub. Date
- 2002-07-25
Patent Term Adjustment
-67days
Parent
is a Continuation of
→
App. 09/648,772
· US 6,333,273
Filed 2000-08-28
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation in-part of
→
App. 08/176,461
· US 5,354,418
Filed 1994-01-03
· Patented Case
Parent
is a Division of
→
App. 08/034,126
· US 5,318,667
Filed 1993-03-18
· Patented Case
Parent
is a Continuation in-part of
→
App. 07/859,336
· US 5,242,539
Filed 1992-03-27
· Patented Case
Child
is a Continuation of
→
App. 10/402,949
· US 7,071,114
Filed 2003-04-01
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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Quick Facts
- App. No.
- 10/024,580
- Filed
- 2001-12-21
- Granted
- 2003-05-13
- Pub. No.
- US20020098708A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- -67 days
External Links