IP Library › Granted Patent US 6,827,866
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US 6,827,866 · Confirmation No. 3229

DEEP-WELL LITHOGRAPHY PROCESS FOR FORMING MICRO-ELECTRO-MECHANICAL STRUCTURES

Inventor: Vlad J. Novotny
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2001-12-21 SPEC Specification 29 View
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2001-12-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,827,866
App. No.
10/027,882
Filed
2001-12-21
Granted
2004-12-07
Art Unit
1765
PTA
-321 days