IP Library › Granted Patent US 6,756,559
Granted Patent Utility
US 6,756,559 · Confirmation No. 2983

PLASMA ETCHING APPARATUS

Inventor: Poong-Boo Seo
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2005-04-22 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-04-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-12-28 TRNA Transmittal of New Application 2 View
2001-12-28 A.PE Preliminary Amendment 3 View
2001-12-28 SPEC Specification 13 View
2001-12-28 CLM Claims 5 View
2001-12-28 ABST Abstract 1 View
2001-12-28 DRW Drawings-only black and white line drawings 3 View
2001-12-28 OATH Oath or Declaration filed 2 View
2001-12-28 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,756,559
App. No.
10/028,301
Filed
2001-12-28
Granted
2004-06-29
Pub. No.
US20020121505A1
Examiner
VAN, QUANG T
Art Unit
3742
PTA
-78 days