IP Library Granted Patent US 6,606,739
Granted Patent Utility
US 6,606,739 · Confirmation No. 2601

SCALING METHOD FOR A DIGITAL PHOTOLITHOGRAPHY SYSTEM

⬇ PDF
Code Description Pages PDF
2001-12-19 TRNA Transmittal of New Application 3 View
2001-12-19 ADS Application Data Sheet 2 View
2001-12-19 SPEC Specification 23 View
2001-12-19 CLM Claims 5 View
2001-12-19 ABST Abstract 1 View
2001-12-19 DRW Drawings-only black and white line drawings 12 View
2001-12-19 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,606,739
App. No.
10/028,479
Filed
2001-12-19
Granted
2003-08-12
Pub. No.
US20020092993A1
Examiner
DO, THUAN V
Art Unit
2825
PTA
-93 days