Granted Patent
Utility
US 6,606,739
· Confirmation No. 2601
SCALING METHOD FOR A DIGITAL PHOTOLITHOGRAPHY SYSTEM
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-12-19 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-12-19 | ADS |
Application Data Sheet | 2 | View | |
| 2001-12-19 | SPEC |
Specification | 23 | View | |
| 2001-12-19 | CLM |
Claims | 5 | View | |
| 2001-12-19 | ABST |
Abstract | 1 | View | |
| 2001-12-19 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-12-19 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
716/21
G03F7/704
G03F7/2002
G03F7/70291
G03F7/70466
Prosecution
- Examiner
- DO, THUAN V
- Art Unit
- 2825
- Customer No.
- 27683
- Docket No.
- 22397.296
- Confirmation No.
- 2601
Publication
- Pub. No.
- US20020092993A1
- Pub. Date
- 2002-07-18
Patent Term Adjustment
-93days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-12-21
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-19
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Quick Facts
- Patent No.
- US 6,606,739
- App. No.
- 10/028,479
- Filed
- 2001-12-19
- Granted
- 2003-08-12
- Pub. No.
- US20020092993A1
- Examiner
- DO, THUAN V
- Art Unit
- 2825
- PTA
- -93 days
External Links