IP Library › Granted Patent US 6,714,833
Granted Patent Utility
US 6,714,833 · Confirmation No. 8394

PERFORMANCE EVALUATION METHOD FOR PLASMA PROCESSING APPARATUS

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2004-02-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-02 OATH Oath or Declaration filed 1 View
2001-11-02 TRNA Transmittal of New Application 2 View
2001-11-02 SPEC Specification 185 View
2001-11-02 CLM Claims 12 View
2001-11-02 ABST Abstract 1 View
2001-11-02 DRW Drawings-only black and white line drawings 36 View
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Quick Facts
Patent No.
US 6,714,833
App. No.
10/033,343
Filed
2001-11-02
Granted
2004-03-30
Pub. No.
US20020132380A1
Art Unit
2125
PTA
0 days