Granted Patent
Utility
US 6,703,328
· Confirmation No. 2753
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-12-21 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-01-09 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-01-09 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-01-15 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-01-15 | SPEC |
Specification | 55 | View | |
| 2002-01-15 | CLM |
Claims | 5 | View | |
| 2002-01-15 | ABST |
Abstract | 1 | View | |
| 2002-01-15 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2002-01-15 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Toshihiko Tanaka
Tokyo, JAPAN
Takashi Hattori
Musashimurayama, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/942
H10P76/00
G03F7/70541
G03F1/38
G03F1/42
G03F7/70741
Prosecution
- Examiner
- DOLAN, JENNIFER M
- Art Unit
- 2813
- Customer No.
- 137137
- Docket No.
- XA-9610
- Confirmation No.
- 2753
Foreign Priority
2001-024092
·
2001-01-31
·
JAPAN
Publication
- Pub. No.
- US20020102477A1
- Pub. Date
- 2002-08-01
Patent Term Adjustment
-93days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-12-11
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-15
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Quick Facts
- Patent No.
- US 6,703,328
- App. No.
- 10/044,987
- Filed
- 2002-01-15
- Granted
- 2004-03-09
- Pub. No.
- US20020102477A1
- Examiner
- DOLAN, JENNIFER M
- Art Unit
- 2813
- PTA
- -93 days
External Links