Implantable sensing device for physiologic parameter measurement
View Patent ↗The present invention defines an implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient. The sensor device includes a substrate and a sensor, integrally formed with the substrate, that is responsive to the physiologic parameter of interest. At least one conductive path is integrally formed with said substrate and coupled to the sensor. Connected to the conductive path is an active circuit. The active circuit is further electrically connected to the sensor.
1. An implantable microfabricated sensing device capable of being entirely implanted within a human body for measuring a physiologic parameter of said human body, said sensing device comprising a biocompatible monolithic structure comprising:
a substrate;
a sensor integrally microfabricated with said substrate and being responsive to the physiologic parameter;
at least one conductive path integrally formed with said substrate and said sensor; and
active circuitry microfabricated in proximity to said sensor and electrically connected to said sensor by said conductive path.
2. The sensing device of claim 1 wherein said sensor is a capacitive sensor having a fixed electrode and a moveable electrode.
3. The sensing device of claim 1 wherein said sensor comprises a cap layer on said substrate.
4. The sensing device of claim 3 wherein said cap layer includes positions defining a diaphragm of said sensor.
5. The sensing device of claim 3 wherein said active circuitry is integrally fabricated in said substrate.
6. The sensing device of claim 3 wherein said cap layer is formed of monocrystalline silicon.
7. The sensing device of claim 3 wherein said cap layer is boron doped silicon.
8. The sensing device of claim 2 wherein said fixed and moveable electrodes define an interior volume therebetween and a surface activity in said substrate defines a displacement cavity in communication with said interior volume.
9. The sensing device of claim 2 wherein said fixed electrode includes a main electrode and at least one reference electrode.
10. The sensing device of claim 1 wherein said sensing device is entirely implanted within said human body and is operating to measure the physiologic parameter within said human body.
11. The sensing device of claim 1 further comprising a cap layer formed over said substrate.
12. The sensing device of claim 11 wherein said cap layer includes a portion defining a moveable electrode of said sensor.
13. The sensing device of claim 11 wherein said cap layer is conductive.
14. The sensing device of claim 12 wherein said cap layer is doped silicon.
15. The sensing device of claim 1 wherein said sensor is a pressure sensor.
16. The sensing device of claim 1 wherein said sensor is a temperature sensor.
17. The sensing device of claim 1 wherein said sensor is a chemical sensor.
18. The sensing device of claim 1 further comprising a cap layer bonded to said substrate, said active circuitry being integrally formed in said cap layer.
19. The sensing device of claim 1 wherein said active circuitry is integrally formed in said substrate.
20. The sensing device of claim 1 wherein said active circuitry is mounted to said substrate.
21. The sensing device of claim 20 wherein said active circuitry is received within a recess defined in said substrate.
22. The sensing device of claim 1 further comprising at least two sensors.
23. The sensing device of claim 22 wherein said two sensors sense the same physiologic parameter.
24. The sensing device of claim 22 wherein said two sensors sense different physiologic parameters.
25. The sensing device of claim 1 wherein said sensor is a capacitive sensor having a fixed electrode and a moveable electrode, said fixed and moveable electrodes being electrically coupled by first and second conductive paths to said active circuitry, said first and second paths being electrically isolated from one another.
26. The sensing device of claim 25 wherein said paths are isolated by a dielectric layer therebetween.
27. The sensing device of claim 25 wherein said paths are isolated by a p-n junction structure.
28. The sensing device of claim 25 wherein said sensor operates in a proximity mode whereby the fixed electrode and the moveable electrode do not contact each other when responding to the physiologic parameter.
29. The sensing device of claim 25 wherein said sensor operates in a touch mode whereby the fixed electrode and the moveable electrode progressively contact each other when responding to the physiologic parameter.
30. The sensing device of claim 1 further comprising a bioinert coating over a majority of exterior surfaces of said sensor.
31. The sensing device of claim 1 further comprising a housing defining a form factor providing an external shape to said sensing device that differs from the monolithic structure.
32. The sensing device of claim 31 wherein said housing is of a non-rigid material.
33. The sensing device of claim 31 wherein said housing is a plastic material.
34. The sensing device of claim 31 wherein said housing comprises a recess providing intimate access to the sensor.
35. The sensing device of claim 2 wherein said fixed electrode is a conductive layer on said substrate.