Method of evaporating film used in an organic electro-luminescent display

1. A method of evaporating thin film used in organic electro-luminescent display, comprising steps of:

providing a display substrate;

providing a mask having a plurality of openings and placed below the display substrate;

providing a plane evaporation source placed below the mask, wherein the plane evaporation source has a plurality of evaporating material cells arranged in array which are respectively aligned to the openings of the mask; and

evaporating the evaporating material cells to deposit a plurality of thin films on predetermined regions of the display substrate;

wherein the formation of the plane evaporation source comprises steps of:

providing a metal plate;

providing at least one kind of evaporation source placed below the metal plate; and

evaporating the evaporation source to form the evaporating material cells on the metal plate.

2. The method according to claim 1 , wherein the evaporating material cell is of organic electro-luminescent materials.

3. The method according to claim 1 , wherein the formation of the plane evaporation source further comprises a step of providing a mask which has a plurality of openings and is disposed between the metal plate and the evaporation source.

4. The method according to claim 1 , wherein a plurality of types of evaporation sources are provided below the metal plate.

5. The method according to claim 1 , wherein the metal plate is rotated during evaporation.

6. The method according to claim 1 , wherein the back side of the metal plate comprises a plurality of supporting ribs.

7. A method of evaporating thin film used in organic electro-luminescent display, comprising steps of:

providing a display substrate;

providing a mask having a plurality of openings and placed below the display substrate;

providing a first plane evaporation source placed below the mask, wherein the first plane evaporation source has a metal net and a plurality of first evaporating material cells which are respectively aligned to the openings of the mask;

providing a second plane evaporation source placed below the first plane evaporation source, wherein the second plane evaporation source has a metal plate and a plurality of second evaporating material cells which are respectively aligned to the openings of the mask; and

evaporating the first evaporating material cells and the second evaporating material cells to deposit a plurality of thin films on predetermined regions of the display substrate.

8. The method according to claim 7 , wherein the first evaporating material cell and the second evaporating material cell are of organic electro-luminescent materials.

9. The method according to claim 7 , wherein the formation of the first plane evaporation source comprises steps of:

providing the metal net;

providing a first mask which has a plurality of first openings and is placed below the metal net;

providing at least one kind of first evaporation source which is placed below the first mask; and

evaporating the first evaporation source to form the first evaporating material cells on the metal net.

10. The method according to claim 9 , wherein the metal net is rotated during evaporation.

11. The method according to claim 9 , wherein the back side of the metal net comprises a plurality of supporting ribs.

12. The method according to claim 7 , wherein the formation of the second plane evaporation source comprises steps of:

providing the metal plate;

providing a second mask which has a plurality of first openings and is placed below the metal plate;

providing at least one kind of second evaporation source which is placed below the second mask; and

evaporating the second evaporation source to form the second evaporating material cells on the metal plate.

13. The method according to claim 12 , wherein the metal plate is rotated during evaporation.

14. The method according to claim 12 , wherein the back side of the metal plate comprises a plurality of supporting ribs.