Modified photolithography movement system
View Patent ↗A method and system is provided for moving a substrate relative to a pixel panel in a digital photolithography system. The method can be used for performing photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a second design resolution. The method includes scanning the first portion of the substrate, having the first design resolution, at a first speed and scanning the second portion of the substrate, having the second design resolution, at a second speed, different from the first.
1. A method for performing digital photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a second design resolution, the method comprising:
scanning the first portion of the substrate at a first speed, comprising moving the substrate relative to the head at a third speed in a first direction; and moving the head relative to the substrate at a fourth speed in the first direction while scanning the first portion of the substrate, wherein the first speed equals the sum of the third and fourth speeds; and
scanning the second portion of the substrate at a second speed different from the first speed, comprising moving the head relative to the substrate at a fifth speed in a second direction opposite to the first direction while scanning the second portion of the substrate, wherein the second speed equals the difference of the third and fifth speeds;
wherein both the first and second portions are scanned on a single pass.
2. The method of claim 1 wherein the fourth and fifth speeds are the same.
3. Software for controlling the movement of a first motor for moving an image producing device during exposure of a substrate, wherein the substrate includes a plurality of circuit components arranged in rows and at least one horizontal component between consecutive rows of the circuit components, the software comprising instructions for:
moving the image producing device at a first speed and in a first direction while exposing the at least one horizontal component; and
moving the image producing device at a second speed and in a second direction opposite from the first direction while exposing the plurality of circuit components;
wherein the substrate constantly moves at a third speed in the first direction during the exposing, and the third speed is greater than the second speed.
4. The method of claim 3 wherein the first speed equals the second speed and the first direction is perpendicular to the rows.
5. The method of claim 3 wherein the first speed equals zero.
6. The method of claim 3 further comprising: providing digital data to the image producing device corresponding to the movement of the image producing device at the first and second speeds.
7. The method of claim 3 wherein the image producing device is a deformable mirror device (DMD).