IP Library Granted Patent US 7,105,131
Granted Patent B2
US 7,105,131 · App. 10/064,980 · Granted Sep 12, 2006

Systems and methods for microelectromechanical system based fluid ejection

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Quick Facts
Patent No.
US 7,105,131
App. No.
10/064,980
Granted
Sep 12, 2006
Kind
B2
Abstract

A microelectromechanical system based fluid ejector comprises an ejector nozzle, a chamber that communicates with the ejector nozzle, and a plurality of movable ejection structures associated with the ejector nozzle and arranged to move in the chamber such that a variable volume of fluid is ejected from the associated ejector nozzle. The plurality of movable ejection structures may also be arranged to move in the chamber such that a continuous flow of fluid is ejected from the associated ejector nozzle. A controller may be used to actuate each of the plurality of movable ejection structures independently. The movable ejection structures may comprise a piston, a flexible diaphragm or the like. A plurality of actuators may be provided, with each of the actuators being associated with one of the ejection structures. The actuators may comprise electrostatic, magnetic or thermal actuators, or the like.

Claims (27)

1. A microelectromechanical system based fluid ejector, comprising:

an ejector nozzle;

a chamber that communicates with the ejector nozzle; and

a plurality of movable ejection structures associated with the ejector nozzle and arranged to individually move in the chamber, each of the ejection structures being configured to cause ejection of fluid from the associated ejector nozzle by moving, such that a variable volume of fluid is ejected from the associated ejector nozzle based on independent movement of the ejection structures.

2. The ejector of claim 1 , further comprising a medical fluid within the chamber.

3. The ejector of claim 2 , wherein the medical fluid is a drug.

4. The ejector of claim 2 , wherein the medical fluid is a biological material.

5. The ejector of claim 1 , further comprising a controller that independently actuates a corresponding actuator of each of the plurality of movable ejection structures.

6. The ejector of claim 1 , wherein each of the plurality of movable ejection structures comprises a piston.

7. The ejector of claim 1 , wherein each of the plurality of movable ejection structures comprises a flexible diaphragm.

8. The ejector of claim 1 , further comprising a plurality of actuators, each of the actuators being associated with one of the ejection structures.

9. The ejector of claim 8 , wherein each of the plurality of actuators comprises an electrostatic actuator.

10. The ejector of claim 8 , wherein each of the plurality of actuators comprises a magnetic actuator.

11. The ejector of claim 8 , wherein each of the plurality of actuators comprises a thermal actuator.

12. A method for ejecting a fluid using a microelectromechanical system based fluid ejector having a chamber, an ejector nozzle and a plurality of movable ejection structures disposed in the chamber and associated with the ejector nozzle, the method comprising:

moving a first movable ejection structure within the chamber, the first movable ejection structure causing ejection of fluid from the associated ejector nozzle by the moving;

moving a second movable ejection structure within the chamber, the first movable ejection structure causing ejection of fluid from the associated ejector nozzle by the moving; and

wherein the movement of the first and second movable ejection structures is independently controlled such that discrete drops or a continuous flow of fluid is ejected from the associated ejector nozzle based on the independent movement of the first and second movable ejection structures.

13. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures is such that a continuous flow of fluid is ejected from the associated ejector nozzle.

14. The method of claim 13 , wherein a flow rate of the continuous flow of fluid is constant.

15. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures such that discrete drops of fluid having variable volumes of fluid are ejected from the associated ejector nozzle and the fluid is a medical fluid.

16. The method of claim 15 , wherein ejecting the medical fluid comprises ejecting at least one of a drug and a biological material.

17. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures comprises controlling a plurality of actuators, each of the actuators being associated with one of the ejection structures.

18. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures comprises electrostatically controlling the moving of the first and second movable ejection structures.

19. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures comprises magnetically controlling the movement of the first and second movable ejection structures.

20. The method of claim 12 , wherein controlling the movement of the first and second movable ejection structures comprises thermally controlling the movement of the first and second movable ejection structures.

21. The method of claim 12 , further comprising independently actuating corresponding actuators of each of the plurality of movable ejection structures.

Assignments (8)
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
RELEASE OF SECURITY INTEREST IN PATENTS AT R/F 062740/0214 Recorded May 18, 2023
From: CITIBANK, N.A., AS AGENT
To: XEROX CORPORATION
Reel/Frame 063694/0122 →
SECURITY INTEREST Recorded Nov 10, 2022
From: XEROX CORPORATION
To: CITIBANK, N.A., AS AGENT
Reel/Frame 062740/0214 →
RELEASE OF SECURITY INTEREST Recorded Sep 7, 2022
From: JPMORGAN CHASE BANK, N.A. AS SUCCESSOR-IN-INTEREST ADMINISTRATIVE AGENT AND COLLATERAL AGENT TO JPMORGAN CHASE BANK
To: XEROX CORPORATION
Reel/Frame 066728/0193 →
SECURITY AGREEMENT Recorded Oct 31, 2003
From: XEROX CORPORATION
To: JPMORGAN CHASE BANK, AS COLLATERAL AGENT
Reel/Frame 015134/0476 →