IP Library Granted Patent US 6,680,263
Granted Patent Utility
US 6,680,263 · Confirmation No. 4366

METHOD FOR APPLYING A PHOTORESIST LAYER TO A SUBSTRATE HAVING A PREEXISTING TOPOLOGY

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Code Description Pages PDF
2003-11-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-02-12 TRNA Transmittal of New Application 2 View
2002-02-12 SPEC Specification 7 View
2002-02-12 CLM Claims 3 View
2002-02-12 ABST Abstract 1 View
2002-02-12 DRW Drawings-only black and white line drawings 1 View
2002-02-12 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,680,263
App. No.
10/074,195
Filed
2002-02-12
Granted
2004-01-20
Pub. No.
US20030152875A1
Art Unit
2813
PTA
0 days