IP Library › Granted Patent US 6,586,056
Granted Patent Utility Small
US 6,586,056 · Confirmation No. 7488

SILICON BASED FILMS FORMED FROM IODOSILANE PRECURSORS AND METHOD OF MAKING THE SAME

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 Code Description Pages PDF
2002-02-19 TRNA Transmittal of New Application 2 View
2002-02-19 ADS Application Data Sheet 2 View
2002-02-19 SPEC Specification 19 View
2002-02-19 CLM Claims 3 View
2002-02-19 ABST Abstract 1 View
2002-02-19 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,586,056
App. No.
10/079,746
Filed
2002-02-19
Granted
2003-07-01
Pub. No.
US20020119327A1
Art Unit
1762
PTA
-104 days