IP Library Granted Patent US 6,602,786
Granted Patent Utility
US 6,602,786 · Confirmation No. 5958

ONE-STEP PROCESS FOR FORMING TITANIUM SILICIDE LAYER ON POLYSILICON

Inventor: Hamilton Lu
⬇ PDF
Code Description Pages PDF
2002-02-21 TRNA Transmittal of New Application 1 View
2002-02-21 ADS Application Data Sheet 1 View
2002-02-21 SPEC Specification 5 View
2002-02-21 CLM Claims 2 View
2002-02-21 ABST Abstract 1 View
2002-02-21 DRW Drawings-only black and white line drawings 2 View
2002-02-21 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,602,786
App. No.
10/082,532
Filed
2002-02-21
Granted
2003-08-05
Pub. No.
US20020132456A1
Art Unit
2823
PTA
-75 days