Methods of fabricating devices and semiconductor layers comprising cadmium mercury telluride, mercury telluride, and cadmium telluride
View Patent ↗The invention relates to a method of depositing Hg 1-x Cd x Te onto a substrate, in a MOVPE technique, where 0≦x≦1; comprising the step of reacting together a volatile organotellurium compound, and one or both of (i) a volatile organocadmium compound and (ii) mercury vapour; characterised in that the organotellurium compound is isopropylallyltelluride. The invention also relates to devices, such as infrared sensors and solar cells, that comprise Hg 1-x Cd x Te materials.
1. A method of depositing Hg 1-x Cd x Te, where 0<x<1, onto a substrate, in a MOVPE technique, comprising reacting together isopropylallyltelluride, a volatile organocadmium compound and mercury vapor, wherein H 1-x Cd x Te is grown by an interdiffused multilayer process involving the alternate growth of cadmium telluride and mercury telluride layers, which are then interdiffused to produce Hg 1-x Cd x Te, and wherein the substrate is maintained at a temperature in the range 150° C. to 350° C.
2. A method of depositing Hg 1-x Cd x Te according to claim 1 wherein the organocadmium compound is an alkyl cadmium compound.
3. A method of depositing Hg 1-x Cd x Te according to claim 2 wherein the alkyl cadmium compound is dimethyl cadmium.
4. A method of depositing Hg 1-x Cd x Te according to claim 1 wherein the substrate comprises glass, or glass coated with indium tin oxide, or CdTe, or CdZnTe, or GaAs, or GaAs/Si, or CdTe/GaAs, or Si.
5. A method of depositing Hg 1-x Cd x Te according to claim 1 wherein the temperature of the substrate is maintained at a temperature in the range 150° C. to 300° C.
6. A method of depositing Hg 1-x Cd x Te according to claim 5 wherein the temperature of the substrate is maintained at a temperature in the range 250° C. to 300° C.
7. A method of fabricating an electronic device comprising the steps of (a) depositing Hg 1-x Cd x Te onto a substrate by a method according to claim 1 ; and (b) connecting at least two electrodes to the Hg 1-x Cd x Te.
8. A method of fabricating an electronic device according to claim 7 wherein the method further comprises the step of doping the Hg 1-x Cd x Te.
9. A method of fabricating an electronic device according to claim 7 wherein the method comprises the further step of doping the Hg 1-x Cd x Te material in such a manner that a p-n junction is formed.
10. A method of fabricating a device according to claim 7 wherein the method further comprises the step of growing a passivating layer of CdTe on the Hg 1-x Cd x Te.
11. A method of depositing Hg 1-x Cd x Te according to claim 1 , wherein the cadmium telluride layer is deposited in the presence of mercury vapor.