Granted Patent
Utility
US 6,682,607
· Confirmation No. 8583
RECONDITIONING OF SEMICONDUCTOR SUBSTRATES TO REMOVE PHOTORESIST DURING SEMICONDUCTOR DEVICE FABRICATION
Inventor:
Anthony J. Farino
Patented Case
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-07 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2003-11-07 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-03-05 | TRNA |
Transmittal of New Application | 5 | View | |
| 2002-03-05 | SPEC |
Specification | 15 | View | |
| 2002-03-05 | CLM |
Claims | 4 | View | |
| 2002-03-05 | ABST |
Abstract | 1 | View | |
| 2002-03-05 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-03-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Anthony J. Farino
Albuquerque, NM
Attorneys & Agents of Record
Classification
USPC
134/26
H10P50/287
H10P72/0406
H10P72/0424
B08B3/02
G03F7/3021
G03F7/422
Y10S134/902
Prosecution
- Examiner
- CARRILLO, BIBI SHARIDAN
- Art Unit
- 1746
- Customer No.
- 20567
- Docket No.
- SD6920S97550
- Confirmation No.
- 8583
Patent Term Adjustment
-82days
No related applications found.
from
SANDIA CORPORATION
CHANGE OF NAME
Recorded 2017-11-03
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Quick Facts
- Patent No.
- US 6,682,607
- App. No.
- 10/092,215
- Filed
- 2002-03-05
- Granted
- 2004-01-27
- Examiner
- CARRILLO, BIBI SHARIDAN
- Art Unit
- 1746
- PTA
- -82 days
External Links