IP Library › Granted Patent US 6,717,325
Granted Patent Utility Small
US 6,717,325 · Confirmation No. 9791

METHOD AND APPARATUS FOR ACTUATION OF A TWO-AXIS MEMS DEVICE USING THREE ACTUATION ELEMENTS

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2003-08-18 LET. Miscellaneous Incoming Letter 1 View
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2003-06-04 CTFR Final Rejection 7 View
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2003-05-16 LET. Miscellaneous Incoming Letter 1 View
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2002-03-06 SRFW Search information including classification, databases and other search related notes 1 View
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2002-03-06 SPEC Specification 7 View
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Quick Facts
Patent No.
US 6,717,325
App. No.
10/093,318
Filed
2002-03-06
Granted
2004-04-06
Pub. No.
US20030189389A1
Art Unit
2834
PTA
-2 days