Granted Patent
Utility
US 6,777,160
· Confirmation No. 5386
POSITIVE-WORKING RESIST COMPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-05-29 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-07-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-03-11 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-03-11 | SPEC |
Specification | 253 | View | |
| 2002-03-11 | CLM |
Claims | 11 | View | |
| 2002-03-11 | ABST |
Abstract | 1 | View | |
| 2002-03-11 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Kenichiro Sato
Shizuoka, JAPAN
Kunihiko Kodama
Shizuoka, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/287.1
G03F7/0045
G03F7/039
G03F7/0395
G03F7/0397
Y10S430/106
Y10S430/115
Y10S430/122
Prosecution
- Examiner
- ASHTON, ROSEMARY E
- Art Unit
- 1752
- Customer No.
- 197
- Docket No.
- Q68914
- Confirmation No.
- 5386
Foreign Priority
P.2001-068849
·
2001-03-12
·
JAPAN
P.2001-068850
·
2001-03-12
·
JAPAN
P.2001-149620
·
2001-05-18
·
JAPAN
Publication
- Pub. No.
- US20030008241A1
- Pub. Date
- 2003-01-09
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-02-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-11
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Quick Facts
- Patent No.
- US 6,777,160
- App. No.
- 10/093,411
- Filed
- 2002-03-11
- Granted
- 2004-08-17
- Pub. No.
- US20030008241A1
- Examiner
- ASHTON, ROSEMARY E
- Art Unit
- 1752
- PTA
- 0 days
External Links